diff --git a/src/boot/boot.c b/src/boot/boot.c
index c2851e1267..967b9db1dc 100644
--- a/src/boot/boot.c
+++ b/src/boot/boot.c
@@ -8,8 +8,8 @@
 #include "device-path-util.h"
 #include "devicetree.h"
 #include "drivers.h"
+#include "efi-efivars.h"
 #include "efi-string-table.h"
-#include "efivars.h"
 #include "efivars-fundamental.h"
 #include "export-vars.h"
 #include "graphics.h"
diff --git a/src/boot/edid.c b/src/boot/edid.c
index 62e338353e..a1a41cc289 100644
--- a/src/boot/edid.c
+++ b/src/boot/edid.c
@@ -2,7 +2,7 @@
 
 #include "edid.h"
 #include "edid-fundamental.h"
-#include "log.h"
+#include "efi-log.h"
 #include "proto/edid-discovered.h"
 #include "util.h"
 
diff --git a/src/boot/efivars.c b/src/boot/efi-efivars.c
similarity index 99%
rename from src/boot/efivars.c
rename to src/boot/efi-efivars.c
index 2613efa6d7..e05997972b 100644
--- a/src/boot/efivars.c
+++ b/src/boot/efi-efivars.c
@@ -1,7 +1,7 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
+#include "efi-efivars.h"
 #include "efi-string.h"
-#include "efivars.h"
 #include "ticks.h"
 #include "util.h"
 
diff --git a/src/boot/efivars.h b/src/boot/efi-efivars.h
similarity index 100%
rename from src/boot/efivars.h
rename to src/boot/efi-efivars.h
diff --git a/src/boot/log.c b/src/boot/efi-log.c
similarity index 99%
rename from src/boot/log.c
rename to src/boot/efi-log.c
index edad4125c6..1810375c6a 100644
--- a/src/boot/log.c
+++ b/src/boot/efi-log.c
@@ -1,6 +1,6 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
-#include "log.h"
+#include "efi-log.h"
 #include "proto/rng.h"
 #include "util.h"
 
diff --git a/src/boot/log.h b/src/boot/efi-log.h
similarity index 100%
rename from src/boot/log.h
rename to src/boot/efi-log.h
diff --git a/src/boot/export-vars.c b/src/boot/export-vars.c
index fb281ad394..25ca62065a 100644
--- a/src/boot/export-vars.c
+++ b/src/boot/export-vars.c
@@ -1,7 +1,7 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
 #include "device-path-util.h"
-#include "efivars.h"
+#include "efi-efivars.h"
 #include "export-vars.h"
 #include "part-discovery.h"
 #include "url-discovery.h"
diff --git a/src/boot/meson.build b/src/boot/meson.build
index 570ea2079e..48d03b5b80 100644
--- a/src/boot/meson.build
+++ b/src/boot/meson.build
@@ -298,13 +298,13 @@ libefi_sources = files(
         'devicetree.c',
         'drivers.c',
         'edid.c',
+        'efi-efivars.c',
         'efi-firmware.c',
+        'efi-log.c',
         'efi-string.c',
-        'efivars.c',
         'export-vars.c',
         'graphics.c',
         'initrd.c',
-        'log.c',
         'measure.c',
         'part-discovery.c',
         'pe.c',
diff --git a/src/boot/random-seed.c b/src/boot/random-seed.c
index 9837a85ccd..a4d7f5ba26 100644
--- a/src/boot/random-seed.c
+++ b/src/boot/random-seed.c
@@ -1,6 +1,6 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
-#include "efivars.h"
+#include "efi-efivars.h"
 #include "memory-util-fundamental.h"
 #include "proto/rng.h"
 #include "random-seed.h"
diff --git a/src/boot/secure-boot.c b/src/boot/secure-boot.c
index f44a6f149b..5781669a4c 100644
--- a/src/boot/secure-boot.c
+++ b/src/boot/secure-boot.c
@@ -1,8 +1,8 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
 #include "console.h"
+#include "efi-efivars.h"
 #include "efi-string-table.h"
-#include "efivars.h"
 #include "proto/security-arch.h"
 #include "secure-boot.h"
 #include "util.h"
diff --git a/src/boot/shim.c b/src/boot/shim.c
index 09d87df530..c84e7fe589 100644
--- a/src/boot/shim.c
+++ b/src/boot/shim.c
@@ -9,7 +9,7 @@
  */
 
 #include "device-path-util.h"
-#include "efivars.h"
+#include "efi-efivars.h"
 #include "secure-boot.h"
 #include "shim.h"
 #include "util.h"
diff --git a/src/boot/smbios.c b/src/boot/smbios.c
index 0e2b8812ee..e2674f6cd3 100644
--- a/src/boot/smbios.c
+++ b/src/boot/smbios.c
@@ -1,7 +1,7 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
+#include "efi-efivars.h"
 #include "efi-string.h"
-#include "efivars.h"
 #include "proto/device-path.h"
 #include "smbios.h"
 #include "string-util-fundamental.h"
diff --git a/src/boot/stub.c b/src/boot/stub.c
index 9cc115a1f6..a117d11332 100644
--- a/src/boot/stub.c
+++ b/src/boot/stub.c
@@ -5,7 +5,7 @@
 #include "cpio.h"
 #include "device-path-util.h"
 #include "devicetree.h"
-#include "efivars.h"
+#include "efi-efivars.h"
 #include "export-vars.h"
 #include "graphics.h"
 #include "iovec-util-fundamental.h"
diff --git a/src/boot/ubsan.c b/src/boot/ubsan.c
index 951204683e..959c78d2bc 100644
--- a/src/boot/ubsan.c
+++ b/src/boot/ubsan.c
@@ -1,6 +1,6 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
-#include "log.h"
+#include "efi-log.h"
 
 typedef struct {
         const char *filename;
diff --git a/src/boot/util.c b/src/boot/util.c
index a218ee2cc1..20db520654 100644
--- a/src/boot/util.c
+++ b/src/boot/util.c
@@ -1,8 +1,8 @@
 /* SPDX-License-Identifier: LGPL-2.1-or-later */
 
 #include "device-path-util.h"
+#include "efi-efivars.h"
 #include "efi-string.h"
-#include "efivars.h"
 #include "memory-util-fundamental.h"
 #include "proto/device-path.h"
 #include "proto/simple-text-io.h"
diff --git a/src/boot/util.h b/src/boot/util.h
index 6b227680b4..4f0fe43149 100644
--- a/src/boot/util.h
+++ b/src/boot/util.h
@@ -8,7 +8,7 @@
 
 #if SD_BOOT
 
-#include "log.h"
+#include "efi-log.h"
 #include "proto/file-io.h"
 
 /* This is provided by the linker. */
diff --git a/src/boot/vmm.c b/src/boot/vmm.c
index 29dbd6ffdb..babe581073 100644
--- a/src/boot/vmm.c
+++ b/src/boot/vmm.c
@@ -8,7 +8,7 @@
 #include "device-path-util.h"
 #include "drivers.h"
 #include "efi-string.h"
-#include "efivars.h"
+#include "efi-efivars.h"
 #include "proto/device-path.h"
 #include "smbios.h"
 #include "string-util-fundamental.h"
diff --git a/src/escape/escape.c b/src/escape/escape-tool.c
similarity index 100%
rename from src/escape/escape.c
rename to src/escape/escape-tool.c
diff --git a/src/escape/meson.build b/src/escape/meson.build
index d21b3722cc..94cd3b1fba 100644
--- a/src/escape/meson.build
+++ b/src/escape/meson.build
@@ -4,6 +4,6 @@ executables += [
         executable_template + {
                 'name' : 'systemd-escape',
                 'public' : true,
-                'sources' : files('escape.c'),
+                'sources' : files('escape-tool.c'),
         },
 ]
diff --git a/src/measure/measure.c b/src/measure/measure-tool.c
similarity index 100%
rename from src/measure/measure.c
rename to src/measure/measure-tool.c
diff --git a/src/measure/meson.build b/src/measure/meson.build
index 13a890170c..e4e4f579df 100644
--- a/src/measure/meson.build
+++ b/src/measure/meson.build
@@ -8,7 +8,7 @@ executables += [
                         'HAVE_OPENSSL',
                         'HAVE_TPM2',
                 ],
-                'sources' : files('measure.c'),
+                'sources' : files('measure-tool.c'),
                 'dependencies' : libopenssl,
         },
 ]
diff --git a/src/network/generator/main.c b/src/network/generator/network-generator-main.c
similarity index 100%
rename from src/network/generator/main.c
rename to src/network/generator/network-generator-main.c
diff --git a/src/network/meson.build b/src/network/meson.build
index 97191fb171..70c5a09bb2 100644
--- a/src/network/meson.build
+++ b/src/network/meson.build
@@ -116,8 +116,8 @@ systemd_networkd_extract_sources = files(
 
 systemd_networkd_wait_online_sources = files(
         'wait-online/dns-configuration.c',
-        'wait-online/link.c',
-        'wait-online/manager.c',
+        'wait-online/wait-online-link.c',
+        'wait-online/wait-online-manager.c',
         'wait-online/wait-online.c',
 )
 
@@ -229,7 +229,7 @@ executables += [
         },
         libexec_template + {
                 'name' : 'systemd-network-generator',
-                'sources' : files('generator/network-generator.c', 'generator/main.c'),
+                'sources' : files('generator/network-generator.c', 'generator/network-generator-main.c'),
                 'extract' : files('generator/network-generator.c'),
                 'link_with' : networkd_link_with,
         },
diff --git a/src/network/wait-online/link.c b/src/network/wait-online/wait-online-link.c
similarity index 99%
rename from src/network/wait-online/link.c
rename to src/network/wait-online/wait-online-link.c
index 7515579edb..f7c2e4fc98 100644
--- a/src/network/wait-online/link.c
+++ b/src/network/wait-online/wait-online-link.c
@@ -6,10 +6,10 @@
 #include "dns-configuration.h"
 #include "format-ifname.h"
 #include "hashmap.h"
-#include "link.h"
-#include "manager.h"
 #include "string-util.h"
 #include "strv.h"
+#include "wait-online-link.h"
+#include "wait-online-manager.h"
 
 static Link* link_free(Link *l) {
 
diff --git a/src/network/wait-online/link.h b/src/network/wait-online/wait-online-link.h
similarity index 100%
rename from src/network/wait-online/link.h
rename to src/network/wait-online/wait-online-link.h
diff --git a/src/network/wait-online/manager.c b/src/network/wait-online/wait-online-manager.c
similarity index 99%
rename from src/network/wait-online/manager.c
rename to src/network/wait-online/wait-online-manager.c
index c4318d3cf5..0ff2c77277 100644
--- a/src/network/wait-online/manager.c
+++ b/src/network/wait-online/wait-online-manager.c
@@ -11,11 +11,12 @@
 #include "alloc-util.h"
 #include "dns-configuration.h"
 #include "json-util.h"
-#include "link.h"
-#include "manager.h"
 #include "netlink-util.h"
+#include "string-util.h"
 #include "strv.h"
 #include "time-util.h"
+#include "wait-online-link.h"
+#include "wait-online-manager.h"
 
 static bool link_in_command_line_interfaces(Link *link, Manager *m) {
         assert(link);
diff --git a/src/network/wait-online/manager.h b/src/network/wait-online/wait-online-manager.h
similarity index 100%
rename from src/network/wait-online/manager.h
rename to src/network/wait-online/wait-online-manager.h
diff --git a/src/network/wait-online/wait-online.c b/src/network/wait-online/wait-online.c
index 58b485bbd1..c693b5335c 100644
--- a/src/network/wait-online/wait-online.c
+++ b/src/network/wait-online/wait-online.c
@@ -11,12 +11,12 @@
 #include "daemon-util.h"
 #include "log.h"
 #include "main-func.h"
-#include "manager.h"
 #include "parse-argument.h"
 #include "pretty-print.h"
 #include "signal-util.h"
 #include "socket-util.h"
 #include "strv.h"
+#include "wait-online-manager.h"
 
 static bool arg_quiet = false;
 static usec_t arg_timeout = 120 * USEC_PER_SEC;
diff --git a/src/path/meson.build b/src/path/meson.build
index 70d3dd0cfd..64c2e1d191 100644
--- a/src/path/meson.build
+++ b/src/path/meson.build
@@ -4,6 +4,6 @@ executables += [
         executable_template + {
                 'name' : 'systemd-path',
                 'public' : true,
-                'sources' : files('path.c'),
+                'sources' : files('path-tool.c'),
         },
 ]
diff --git a/src/path/path.c b/src/path/path-tool.c
similarity index 100%
rename from src/path/path.c
rename to src/path/path-tool.c
diff --git a/src/random-seed/meson.build b/src/random-seed/meson.build
index daa2eefa74..6e8292f8d4 100644
--- a/src/random-seed/meson.build
+++ b/src/random-seed/meson.build
@@ -4,6 +4,6 @@ executables += [
         libexec_template + {
                 'name' : 'systemd-random-seed',
                 'conditions' : ['ENABLE_RANDOMSEED'],
-                'sources' : files('random-seed.c'),
+                'sources' : files('random-seed-tool.c'),
         },
 ]
diff --git a/src/random-seed/random-seed.c b/src/random-seed/random-seed-tool.c
similarity index 100%
rename from src/random-seed/random-seed.c
rename to src/random-seed/random-seed-tool.c